Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region

Not Accessible

Your library or personal account may give you access

Abstract

We describe a simple method to fabricate blazed gratings used in the extreme ultraviolet wavelength region. The method uses an argon and oxygen mixed-gas ion beam to directly etch the grating substrate through a rectangular profile photoresist grating mask. With this method the etched grating groove profile can be well controlled. An MoSi multilayer-coated specimen with a blaze angle of 1.9° was fabricated and measured. At an incident angle of 10° and a wavelength of 13.62nm, the diffraction efficiency of the negative second order reaches 36.2%.

© 2008 Optical Society of America

Full Article  |  PDF Article
More Like This
Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating

M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, and W. R. Hunter
Opt. Lett. 29(24) 2914-2916 (2004)

High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths

Dmitriy L. Voronov, Minseung Ahn, Erik H. Anderson, Rossana Cambie, Chih-Hao Chang, Eric M. Gullikson, Ralf K. Heilmann, Farhad Salmassi, Mark L. Schattenburg, Tony Warwick, Valeriy V. Yashchuk, Lucas Zipp, and Howard A. Padmore
Opt. Lett. 35(15) 2615-2617 (2010)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved