Microscopic TV shearography for characterization of microsystems
Optics Letters, Vol. 34, Issue 10, pp. 1612-1614 (2009)
http://dx.doi.org/10.1364/OL.34.001612
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Abstract
We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented.
© 2009 Optical Society of America
OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6160) Instrumentation, measurement, and metrology : Speckle interferometry
(120.6165) Instrumentation, measurement, and metrology : Speckle interferometry, metrology
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: February 17, 2009
Revised Manuscript: April 6, 2009
Manuscript Accepted: April 6, 2009
Published: May 15, 2009
Citation
U. Paul Kumar, M. P. Kothiyal, and N. Krishna Mohan, "Microscopic TV shearography for characterization of microsystems," Opt. Lett. 34, 1612-1614 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-10-1612
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