Interferometric quasi-absolute tests for aspherics using a radial shear position
Optics Letters, Vol. 34, Issue 20, pp. 3178-3180 (2009)
http://dx.doi.org/10.1364/OL.34.003178
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Abstract
Increasing accuracy requirements in aspheric metrology make the development of absolute testing procedures for aspheric surfaces important. One strategy is transferring the standard practice three-position test for spheres to aspherics. The three-position test, however, involves a cat’s eye position and therefore has certain drawbacks. We propose an absolute testing method for rotationally symmetric aspherics where the cat’s eye position is replaced with a radially sheared position. Together with rotational movements of the specimen, the surface deviations can be obtained in an absolute manner. To demonstrate the validity of the procedure, we present a measurement result for a sphere and compare it with a result obtained by the standard three-position test.
© 2009 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(220.4840) Optical design and fabrication : Testing
(260.0260) Physical optics : Physical optics
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: July 28, 2009
Manuscript Accepted: August 27, 2009
Published: October 12, 2009
Citation
Klaus Mantel, Eduard Geist, Irina Harder, Norbert Lindlein, and Gerd Leuchs, "Interferometric quasi-absolute tests for aspherics using a radial shear position," Opt. Lett. 34, 3178-3180 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-20-3178
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