OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 34, Iss. 24 — Dec. 15, 2009
  • pp: 3800–3802

Monolithic double-grating phase mask for large-period highly coherent grating printing

Y. Bourgin, S. Bakkali, Y. Jourlin, S. Tonchev, and O. Parriaux  »View Author Affiliations


Optics Letters, Vol. 34, Issue 24, pp. 3800-3802 (2009)
http://dx.doi.org/10.1364/OL.34.003800


View Full Text Article

Enhanced HTML    Acrobat PDF (202 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A monolithic double-grating phase mask comprising three short-pitch grating sections of spatial frequencies k 1 and k 2 collocated at one side of a substrate produces a large-period interferogram without higher harmonics to print in a photoresist film a latent grating of small spatial frequency equal to twice k 2 k 1 . When incorporated in a write-on-the-fly scheme, the elements permit the fabrication of unlimitedly long gratings.

© 2009 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

History
Original Manuscript: September 4, 2009
Revised Manuscript: November 3, 2009
Manuscript Accepted: November 4, 2009
Published: December 4, 2009

Citation
Y. Bourgin, S. Bakkali, Y. Jourlin, S. Tonchev, and O. Parriaux, "Monolithic double-grating phase mask for large-period highly coherent grating printing," Opt. Lett. 34, 3800-3802 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-24-3800

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited