We describe a simple heterodyne laser interferometer that has subnanometer periodic errors and is applicable to industrial fields. Two spatially separated beams can reduce the periodic errors, and the use of a right-angle prism makes the optical configuration much simpler than previous interferometers. Moreover, the optical resolution can be enhanced by a factor of 2, because the phase change direction is opposite between reference and measurement signals. Experiments have demonstrated the periodic errors are less than $0.15\mathrm{nm}$ owing to the frequency mixing of the optical source. The improvements for reducing the frequency mixing of the optical system are also discussed.

© 2009 Optical Society of America

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