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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 34, Iss. 3 — Feb. 1, 2009
  • pp: 386–388

Simple heterodyne laser interferometer with subnanometer periodic errors

Ki-Nam Joo, Jonathan D. Ellis, Jo W. Spronck, Paul J.M. van Kan, and Robert H.Munnig Schmidt  »View Author Affiliations


Optics Letters, Vol. 34, Issue 3, pp. 386-388 (2009)
http://dx.doi.org/10.1364/OL.34.000386


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Abstract

We describe a simple heterodyne laser interferometer that has subnanometer periodic errors and is applicable to industrial fields. Two spatially separated beams can reduce the periodic errors, and the use of a right-angle prism makes the optical configuration much simpler than previous interferometers. Moreover, the optical resolution can be enhanced by a factor of 2, because the phase change direction is opposite between reference and measurement signals. Experiments have demonstrated the periodic errors are less than 0.15 nm owing to the frequency mixing of the optical source. The improvements for reducing the frequency mixing of the optical system are also discussed.

© 2009 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 9, 2008
Revised Manuscript: December 10, 2008
Manuscript Accepted: December 11, 2008
Published: January 30, 2009

Citation
Ki-Nam Joo, Jonathan D. Ellis, Jo W. Spronck, Paul J. M. van Kan, and Robert H. Munnig Schmidt, "Simple heterodyne laser interferometer with subnanometer periodic errors," Opt. Lett. 34, 386-388 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-3-386


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