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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 34, Iss. 6 — Mar. 15, 2009
  • pp: 788–790

Complex periodic micro/nanostructures on 6 H - Si C crystal induced by the interference of three femtosecond laser beams

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu  »View Author Affiliations

Optics Letters, Vol. 34, Issue 6, pp. 788-790 (2009)

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We reported three types of complex micro/nanostructures on 6 H - Si C crystal induced by the interferences of three femtosecond laser beams by arranging three types of laser polarization combinations. The micro/nanostructures are composed of two parts: two-dimensional long-periodic micropatterns determined by the interferential intensity pattern and short-periodic nanopatterns determined by the interferential polarization pattern. Theoretical calculation indicates that the different polarization combinations will lead to a distinct complex interferential polarization pattern and intensity pattern, and they accord well with the experimental results.

© 2009 Optical Society of America

OCIS Codes
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors
(110.4235) Imaging systems : Nanolithography
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Ultrafast Optics

Original Manuscript: December 4, 2008
Revised Manuscript: January 28, 2009
Manuscript Accepted: February 4, 2009
Published: March 11, 2009

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, "Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams," Opt. Lett. 34, 788-790 (2009)

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