Abstract

We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of $145\mathrm{nm}$ $({\lambda }_0∕9)$ in the direction perpendicular to the polarization direction.

© 2009 Optical Society of America

Subsurface microscopy of interconnect layers of an integrated circuit

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