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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 34, Iss. 9 — May. 1, 2009
  • pp: 1429–1431

Polarization-ratio reflectance measurements in the extreme ultraviolet

N. Brimhall, N. Heilmann, M. Ware, and J. Peatross  »View Author Affiliations


Optics Letters, Vol. 34, Issue 9, pp. 1429-1431 (2009)
http://dx.doi.org/10.1364/OL.34.001429


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Abstract

We demonstrate a technique for determining optical constants of materials in the extreme UV from the ratio of p-polarized to s-polarized reflectance. The measurements are based on laser-generated high-order harmonics, which have easily rotatable linear polarization but that are prone to brightness fluctuations and systematic drifts during measurement. Rather than measure the absolute reflectance, we extract the optical constants of a material from the ratio of p-polarized to s-polarized reflectance at multiple incident angles. This has the advantage of dividing out long-term fluctuations and possible systematic errors. We show that the reflectance ratio is as sensitive as the absolute reflectance to material optical properties.

© 2009 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
X-ray Optics

History
Original Manuscript: January 29, 2009
Revised Manuscript: March 7, 2009
Manuscript Accepted: March 25, 2009
Published: April 28, 2009

Citation
N. Brimhall, N. Heilmann, M. Ware, and J. Peatross, "Polarization-ratio reflectance measurements in the extreme ultraviolet," Opt. Lett. 34, 1429-1431 (2009)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-9-1429


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References

  1. B. Kjornrattanawanich, R. Soufli, S. Bajt, D. L. Windt, and J. F. Seely, Proc. SPIE 5538, 17 (2004). [CrossRef]
  2. R. Soufli, A. L. Aquila, F. Salmassi, M. Fernández-Perea, and E. M. Gullikson, Appl. Opt. 47, 4633 (2008). [CrossRef] [PubMed]
  3. D. Garoli, F. Frassetto, G. Monaco, P. Nicolosi, M. G. Pelizzo, F. Rigato, V. Rigato, A. Giglia, and S. Nannarone, Appl. Opt. 45, 5642 (2006). [CrossRef] [PubMed]
  4. R. Soufli and E. Gullikson, Appl. Opt. 36, 5499 (1997). [CrossRef] [PubMed]
  5. J. B. Kortright and D. L. Windt, Appl. Opt. 27, 2841 (1988). [CrossRef] [PubMed]
  6. N. Brimhall, M. Turner, N. Herrick, D. D. Allred, R. S. Turley, M. Ware, and J. Peatross, Rev. Sci. Instrum. 79, 103108 (2008). [CrossRef] [PubMed]
  7. D. G. Avery, Proc. Phys. Soc. London Sect. B 65, 425 (1952). [CrossRef]
  8. R. F. Miller and A. J. Taylor, J. Phys. D 4, 1419 (1971). [CrossRef]
  9. R. F. Miller, L. S. Julien, and A. J. Taylor, J. Phys. F 4, 2338 (1974). [CrossRef]
  10. H. R. Philipp and E. A. Taft, Phys. Rev. 113, 1002 (1959). [CrossRef]
  11. D. Schulze, M. Dorr, G. Sommerer, J. Ludwig, P. Nickles, T. Schlegel, W. Sandner, M. Drescher, U. Kleineberg, and U. Heinzmann, Phys. Rev. A 57, 3003 (1998). [CrossRef]
  12. In this measurement, our samples typically become contaminated with a thin layer of hydrocarbons during transfer from the deposition chamber to the measurement chamber. Our algorithm also had to determine the constants for the contaminant layer (the thickness of the contaminant having been characterized by a separate ellipsometry measurement) to extract the constants for the SiO2 layer. We used the optical constants of carbon for this first layer when determining the constants for SiO2. Conversely, we obtained the optical constants of carbon when the constants for SiO2 were used for the layer beneath the contaminant. In the future, we plan to do in situ deposition and measurement (an advantage for our instrument) for which sample contamination should be less of an issue.
  13. E. Hecht, Optics, 4th ed. (Addison-Wesley, 2002).
  14. A. Vasicek, Optics of Thin Films (North-Holland, 1960).
  15. B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993). [CrossRef]

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