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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 35, Iss. 10 — May. 15, 2010
  • pp: 1695–1697

Femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors

Li Guo, Hong Xia, Hui-Tao Fan, Yong-Lai Zhang, Qi-Dai Chen, Tong Zhang, and Hong-Bo Sun  »View Author Affiliations


Optics Letters, Vol. 35, Issue 10, pp. 1695-1697 (2010)
http://dx.doi.org/10.1364/OL.35.001695


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Abstract

Reported is femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors (FIMS), meaning the capability to fabricate multiple functional sensors of smaller size on a nonflat surface of a substrate that is not limited to silicon. As a representative example, a photosensitive Sn O 2 colloidal solution (sol) was developed, from which complex micronanostructures were written via a two-photon absorption process. After thermal decomposition of organic components, the patterned Sn O 2 microsensors responded to relative humidity (RH) with a variation range of 5 orders of magnitude. FIMS would open a new door for miniaturization of micronanosensors expected in intelligent microsystems.

© 2010 Optical Society of America

OCIS Codes
(160.6060) Materials : Solgel
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Materials

History
Original Manuscript: January 25, 2010
Revised Manuscript: April 10, 2010
Manuscript Accepted: April 15, 2010
Published: May 14, 2010

Citation
Li Guo, Hong Xia, Hui-Tao Fan, Yong-Lai Zhang, Qi-Dai Chen, Tong Zhang, and Hong-Bo Sun, "Femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors," Opt. Lett. 35, 1695-1697 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-10-1695

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