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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 35, Iss. 16 — Aug. 15, 2010
  • pp: 2774–2776

Highly efficient three-level blazed grating in the resonance domain

Maria Oliva, Dirk Michaelis, Tino Benkenstein, Jens Dunkel, Torsten Harzendorf, Andre Matthes, and Uwe D. Zeitner  »View Author Affiliations


Optics Letters, Vol. 35, Issue 16, pp. 2774-2776 (2010)
http://dx.doi.org/10.1364/OL.35.002774


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Abstract

We designed, fabricated, and characterized three-level transmission gratings in the resonance domain with reduced shadowing losses based on a three-wave interference mechanism. A new technological approach allows for fabrication of homogeneous and large area multilevel gratings without spurious artifacts. To our knowledge, the measured efficiency of 86% exhibits the largest value yet reported for a multilevel transmission grating in the resonance domain close to normal incidence.

© 2010 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(220.3740) Optical design and fabrication : Lithography
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.5745) Diffraction and gratings : Resonance domain
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

History
Original Manuscript: June 28, 2010
Manuscript Accepted: July 10, 2010
Published: August 13, 2010

Citation
Maria Oliva, Dirk Michaelis, Tino Benkenstein, Jens Dunkel, Torsten Harzendorf, Andre Matthes, and Uwe D. Zeitner, "Highly efficient three-level blazed grating in the resonance domain," Opt. Lett. 35, 2774-2776 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-16-2774


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References

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