Highly efficient three-level blazed grating in the resonance domain
Optics Letters, Vol. 35, Issue 16, pp. 2774-2776 (2010)
http://dx.doi.org/10.1364/OL.35.002774
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Abstract
We designed, fabricated, and characterized three-level transmission gratings in the resonance domain with reduced shadowing losses based on a three-wave interference mechanism. A new technological approach allows for fabrication of homogeneous and large area multilevel gratings without spurious artifacts. To our knowledge, the measured efficiency of 86% exhibits the largest value yet reported for a multilevel transmission grating in the resonance domain close to normal incidence.
© 2010 Optical Society of America
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(220.3740) Optical design and fabrication : Lithography
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.5745) Diffraction and gratings : Resonance domain
(050.6624) Diffraction and gratings : Subwavelength structures
ToC Category:
Diffraction and Gratings
History
Original Manuscript: June 28, 2010
Manuscript Accepted: July 10, 2010
Published: August 13, 2010
Citation
Maria Oliva, Dirk Michaelis, Tino Benkenstein, Jens Dunkel, Torsten Harzendorf, Andre Matthes, and Uwe D. Zeitner, "Highly efficient three-level blazed grating in the resonance domain," Opt. Lett. 35, 2774-2776 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-16-2774
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