Subsurface microscopy of interconnect layers of an integrated circuit
Optics Letters, Vol. 35, Issue 2, pp. 184-186 (2010)
http://dx.doi.org/10.1364/OL.35.000184
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Abstract
We apply the NA-increasing lens technique to confocal and wide-field backside microscopy of integrated circuits. We demonstrate
© 2010 Optical Society of America
OCIS Codes
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(180.1790) Microscopy : Confocal microscopy
(260.2110) Physical optics : Electromagnetic optics
(260.5430) Physical optics : Polarization
ToC Category:
Microscopy
History
Original Manuscript: October 22, 2009
Manuscript Accepted: November 22, 2009
Published: January 13, 2010
Citation
F. Hakan Köklü and M. Selim Ünlü, "Subsurface microscopy of interconnect layers of an integrated circuit," Opt. Lett. 35, 184-186 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-2-184
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