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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 35, Iss. 24 — Dec. 15, 2010
  • pp: 4226–4228

Internal reflection ellipsometry in air and water ambient

Soichi Otsuki and Mitsuru Ishikawa  »View Author Affiliations

Optics Letters, Vol. 35, Issue 24, pp. 4226-4228 (2010)

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We measured a multilayer sample in air and water ambient below the critical angle of incidence based on internal reflection ellipsometry (IRE). Measurements with varying incident angle and varying wavelength both provided values by the fitting for refractive indices and thicknesses of layers consistent with design or theoretical ones. This verified that IRE is useful in measurement and analysis of thin films on transparent substrates and especially effective to study thin films at transparent substrate–liquid interfaces.

© 2010 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(310.6860) Thin films : Thin films, optical properties
(280.1415) Remote sensing and sensors : Biological sensing and sensors

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: October 21, 2010
Manuscript Accepted: November 6, 2010
Published: December 16, 2010

Soichi Otsuki and Mitsuru Ishikawa, "Internal reflection ellipsometry in air and water ambient," Opt. Lett. 35, 4226-4228 (2010)

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