OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 35, Iss. 7 — Apr. 1, 2010
  • pp: 1013–1015

Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices

Joris Van Campenhout, William M. J. Green, Solomon Assefa, and Yurii A. Vlasov  »View Author Affiliations


Optics Letters, Vol. 35, Issue 7, pp. 1013-1015 (2010)
http://dx.doi.org/10.1364/OL.35.001013


View Full Text Article

Enhanced HTML    Acrobat PDF (353 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We report the performance of NiSi-based heaters integrated with submicrometer silicon waveguides. The heaters were fabricated using a standard complementary metal-oxide-semiconductor (CMOS) silicidation process on a thin silicon slab laterally connected with a silicon rib waveguide. The intrinsic properties of such NiSi waveguide heaters were characterized by using them as thermo-optic phase shifters in a Mach–Zehnder interferometer. The power consumption P π for obtaining a π phase shift was measured to be as low as 20 mW, using CMOS-compatible drive voltages. The time constant of the thermo-optic response was less than 2.8 μ s . Simulations suggest that a further reduction in the power consumption P π is feasible.

© 2010 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.3130) Integrated optics : Integrated optics materials

ToC Category:
Integrated Optics

History
Original Manuscript: January 4, 2010
Revised Manuscript: February 10, 2010
Manuscript Accepted: February 14, 2010
Published: March 29, 2010

Citation
Joris Van Campenhout, William M. J. Green, Solomon Assefa, and Yurii A. Vlasov, "Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices," Opt. Lett. 35, 1013-1015 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-7-1013


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. Y. Vlasov, M. O'Boyle, H. F. Hamann, and S. J. McNab, Nature 438, 65 (2005). [CrossRef] [PubMed]
  2. M. Watts, W. A. Zortman, D. C. Trotter, G. N. Nielson, D. L. Luck, and R. W. Young, in Conference on Lasers and Electro-Optics (Optical Society of America, 2009), paper CPDB10.
  3. F. Gan, T. Barwicz, M. A. Popović, M. S. Dahlem, C. W. Holtzwarth, P. T. Rakich, H. I. Smith, E. P. Ippen, and F. X. Kärtner, in Proceedings of IEEE Photonics in Switching (IEEE, 2007), pp. 67-68. [CrossRef]
  4. R. L. Espinola, M.-C. Tsai, J. T. Yardley, and R. M. Osgood, IEEE Photon. Technol. Lett. 15, 1366 (2003). [CrossRef]
  5. T. Chu, H. Yamada, S. Ishida, and Y. Arakawa, Opt. Express 13, 10109 (2005). [CrossRef] [PubMed]
  6. M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, IEEE Photon. Technol. Lett. 16, 2514 (2004). [CrossRef]
  7. P. Dumon, G. Priem, L. R. Nunes, W. Bogaerts, D. Van Thourhout, P. Bienstman, T. K. Liang, M. Tsuchiya, P. Jaenen, S. Beckx, J. Wouters, and R. Baets, Jpn. J. Appl. Phys. Part 1 45, 6589 (2006). [CrossRef]
  8. H. F. Hamann, A. Weger, J. A. Lacey, Z. G. Hu, E. Cohen, and J. Wakil, IEEE J. Solid-State Circuits 42, 56 (2007). [CrossRef]
  9. W. M. Green, H. F. Hamann, and Y. Vlasov, “Silicide thermal heaters for silicon-on-insulator nanophotonic devices,” U.S. patent application 11/849591 (April 9, 2007).
  10. S. Assefa, C. Janes, and Y. Vlasov, “CMOS compatible integrated dielectric optical waveguide coupler and fabrication,” U.S. patent application 12/164580 (June 30, 2008).
  11. W. Liu and M. Asheghi, Appl. Phys. Lett. 84, 3819 (2004). [CrossRef]
  12. R. Sultan, A. D. Avery, G. Stiehl, and B. L. Zink, J. Appl. Phys. 105, 043501 (2009). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4 Fig. 5
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited