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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 35, Iss. 8 — Apr. 15, 2010
  • pp: 1290–1292

Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits

Yongbo Tang, Zhechao Wang, Lech Wosinski, Urban Westergren, and Sailing He  »View Author Affiliations

Optics Letters, Vol. 35, Issue 8, pp. 1290-1292 (2010)

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We present design, fabrication, and characterization of a silicon-on-insulator grating coupler of high efficiency for coupling between a silicon nanophotonic waveguide and a single mode fiber. By utilizing the lag effect of the dry etching process, a grating coupler consisting of nonuniform grooves with different widths and depths is designed and fabricated to maximize the overlapping between the upward wave and the fiber mode. The measured waveguide-to-fiber coupling efficiency of 64% (−1.9 dB) for the transverse electric polarization is achieved by the present nonuniform grating coupler directly defined on a regular silicon-on-insulator wafer.

© 2010 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(060.1810) Fiber optics and optical communications : Buffers, couplers, routers, switches, and multiplexers
(130.3120) Integrated optics : Integrated optics devices

ToC Category:
Integrated Optics

Original Manuscript: January 25, 2010
Revised Manuscript: March 12, 2010
Manuscript Accepted: March 15, 2010
Published: April 15, 2010

Yongbo Tang, Zhechao Wang, Lech Wosinski, Urban Westergren, and Sailing He, "Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits," Opt. Lett. 35, 1290-1292 (2010)

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