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Optics Letters

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  • Vol. 36, Iss. 16 — Aug. 15, 2011
  • pp: 3112–3114

Wide measurement range scanning heterodyne interferometer utilizing astigmatic position sensing scheme

Youngkyu Park, Kyoung-Eop Kim, Seong-Jin Kim, June-Gyu Park, Young-Hun Joo, Bu Hyun Shin, Seung-Yop Lee, and Kyuman Cho  »View Author Affiliations


Optics Letters, Vol. 36, Issue 16, pp. 3112-3114 (2011)
http://dx.doi.org/10.1364/OL.36.003112


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Abstract

A scanning heterodyne I/Q-interferometer scheme is proposed to overcome phase ambiguity caused by the periodic nature of its phase-dependent signal. A position sensing scheme using an astigmatic method in the confocal arrangement has been interfaced to the interferometer to retrieve the real phase value during a scanning process. The experimental results show that the vertical measurement range can be expanded up to 16 μm . The potential of this interferometer on the scanning microscopy of a rough surface is discussed.

© 2011 Optical Society of America

OCIS Codes
(100.5070) Image processing : Phase retrieval
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 31, 2011
Revised Manuscript: July 12, 2011
Manuscript Accepted: July 13, 2011
Published: August 10, 2011

Virtual Issues
Vol. 6, Iss. 9 Virtual Journal for Biomedical Optics

Citation
Youngkyu Park, Kyoung-Eop Kim, Seong-Jin Kim, June-Gyu Park, Young-Hun Joo, Bu Hyun Shin, Seung-Yop Lee, and Kyuman Cho, "Wide measurement range scanning heterodyne interferometer utilizing astigmatic position sensing scheme," Opt. Lett. 36, 3112-3114 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-16-3112


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