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Optics Letters

Optics Letters


  • Vol. 36, Iss. 17 — Sep. 1, 2011
  • pp: 3464–3466

Micromirror with large-tilting angle using Fe-based metallic glass

Jae-Wung Lee, Yu-Ching Lin, Neelam Kaushik, Parmanand Sharma, Akihiro Makino, Akihisa Inoue, Masayoshi Esashi, and Thomas Gessner  »View Author Affiliations

Optics Letters, Vol. 36, Issue 17, pp. 3464-3466 (2011)

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For enhancing the micromirror properties like tilting angle and stability during actuation, Fe-based metallic glass (MG) was applied for torsion bar material. A micromirror with mirror-plate diameter of 900 μm and torsion bar dimensions length 250 μm , width 30 μm and thickness 2.5 μm was chosen for the tilting angle tests, which were performed by permanent magnets and electromagnet setup. An extremely large tilting angle of over 270 ° was obtained from an activation test by permanent magnet that has approximately 0.2 T of magnetic strength. A large mechanical tilting angle of over 70 ° was obtained by applying approximately 1.1 mT to the mirror when 93 mA was applied to solenoid setup. The large-tilting angle of the micromirror is due to the torsion bar, which was fabricated with Fe-based MG thin film that has large elastic strain limit, fracture toughness, and excellent magnetic property.

© 2011 Optical Society of America

OCIS Codes
(120.5800) Instrumentation, measurement, and metrology : Scanners
(230.4000) Optical devices : Microstructure fabrication
(160.3918) Materials : Metamaterials

ToC Category:
Optical Devices

Original Manuscript: May 16, 2011
Revised Manuscript: June 14, 2011
Manuscript Accepted: July 4, 2011
Published: August 31, 2011

Jae-Wung Lee, Yu-Ching Lin, Neelam Kaushik, Parmanand Sharma, Akihiro Makino, Akihisa Inoue, Masayoshi Esashi, and Thomas Gessner, "Micromirror with large-tilting angle using Fe-based metallic glass," Opt. Lett. 36, 3464-3466 (2011)

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