Abstract

For enhancing the micromirror properties like tilting angle and stability during actuation, Fe-based metallic glass (MG) was applied for torsion bar material. A micromirror with mirror-plate diameter of $900\mathrm{\mu m}$ and torsion bar dimensions length $250\mathrm{\mu m}$, width $30\mathrm{\mu m}$ and thickness $2.5\mathrm{\mu m}$ was chosen for the tilting angle tests, which were performed by permanent magnets and electromagnet setup. An extremely large tilting angle of over $-270°$ was obtained from an activation test by permanent magnet that has approximately $0.2\mathrm{T}$ of magnetic strength. A large mechanical tilting angle of over $-70°$ was obtained by applying approximately $1.1\mathrm{mT}$ to the mirror when $93\mathrm{mA}$ was applied to solenoid setup. The large-tilting angle of the micromirror is due to the torsion bar, which was fabricated with Fe-based MG thin film that has large elastic strain limit, fracture toughness, and excellent magnetic property.

© 2011 Optical Society of America

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