OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 36, Iss. 17 — Sep. 1, 2011
  • pp: 3464–3466

Micromirror with large-tilting angle using Fe-based metallic glass

Jae-Wung Lee, Yu-Ching Lin, Neelam Kaushik, Parmanand Sharma, Akihiro Makino, Akihisa Inoue, Masayoshi Esashi, and Thomas Gessner  »View Author Affiliations


Optics Letters, Vol. 36, Issue 17, pp. 3464-3466 (2011)
http://dx.doi.org/10.1364/OL.36.003464


View Full Text Article

Enhanced HTML    Acrobat PDF (257 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

For enhancing the micromirror properties like tilting angle and stability during actuation, Fe-based metallic glass (MG) was applied for torsion bar material. A micromirror with mirror-plate diameter of 900 μm and torsion bar dimensions length 250 μm , width 30 μm and thickness 2.5 μm was chosen for the tilting angle tests, which were performed by permanent magnets and electromagnet setup. An extremely large tilting angle of over 270 ° was obtained from an activation test by permanent magnet that has approximately 0.2 T of magnetic strength. A large mechanical tilting angle of over 70 ° was obtained by applying approximately 1.1 mT to the mirror when 93 mA was applied to solenoid setup. The large-tilting angle of the micromirror is due to the torsion bar, which was fabricated with Fe-based MG thin film that has large elastic strain limit, fracture toughness, and excellent magnetic property.

© 2011 Optical Society of America

OCIS Codes
(120.5800) Instrumentation, measurement, and metrology : Scanners
(230.4000) Optical devices : Microstructure fabrication
(160.3918) Materials : Metamaterials

ToC Category:
Optical Devices

History
Original Manuscript: May 16, 2011
Revised Manuscript: June 14, 2011
Manuscript Accepted: July 4, 2011
Published: August 31, 2011

Citation
Jae-Wung Lee, Yu-Ching Lin, Neelam Kaushik, Parmanand Sharma, Akihiro Makino, Akihisa Inoue, Masayoshi Esashi, and Thomas Gessner, "Micromirror with large-tilting angle using Fe-based metallic glass," Opt. Lett. 36, 3464-3466 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-17-3464


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. Schroers and N. Paton, Adv. Mater. Process. 164, 61(2006).
  2. W. L. Johnson, MRS Bull. 24, 42 (1999).
  3. Mark Telford, Mater. Today 7, 36 (2004). [CrossRef]
  4. H.-A. Yang, T.-L. Tang, S. T.Lee, and W. Fang, J. Microelectromech. Syst. 16, 511 (2007). [CrossRef]
  5. J. Akedo, M. Lebedev, H. Sato, and J. Park, Jpn. J. Appl. Phys. 44, 7072 (2005). [CrossRef]
  6. J. Schroers and W. L. Johnson, Phys. Rev. Lett. 93, 255506 (2004). [CrossRef]
  7. Y. H. Liu, G. Wang, R. J. Wang, D. Q. Zhao, M. X. Pan, and W. H. Wang, Science 315, 1385 (2007). [CrossRef] [PubMed]
  8. M. E. Launey, D. C. Hofmann, J.-Y. Suh, H. Kozachkov, W. L. Johnson, and R. O. Ritchie, Appl. Phys. Lett. 94, 241910(2009). [CrossRef]
  9. Q. He, Y.-Q. Cheng, E. Ma, and J. Xu, Acta Mater. 59, 202 (2011). [CrossRef]
  10. A. Makino, T. Kubota, C. Chang, M. Makabe, and A. Inoue, Mater. Trans. JIM 48, 3024 (2007). [CrossRef]
  11. N. Asada, H. Matsuki, K. Minami, and M. Esashi, IEEE Trans. Magn. 30, 4647 (1994). [CrossRef]
  12. J. W. Judy and R. S. Muller, J. Microelectromech. Syst. 6, 249 (1997). [CrossRef]
  13. T. Bourouina, A. Garnier, and H. Fujita, J. Appl. Phys. 91,112 (2002). [CrossRef]
  14. H. Schenk, P. Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kück, IEEE J. Sel. Top. Quantum Electron. 6, 715 (2000). [CrossRef]
  15. Y. Wu, H. X. Li, G. L. Chen, X. D. Hui, B. Y. Wang, and Z. P. Lu, Scr. Mater. 61, 564 (2009). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited