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Optics Letters

Optics Letters


  • Vol. 36, Iss. 2 — Jan. 15, 2011
  • pp: 214–216

Experimental requirement of the error-compensating five-frame interferogram-collecting sequence used in phase-shifting interferometry

N. Ansari and W. R. Ashurst  »View Author Affiliations

Optics Letters, Vol. 36, Issue 2, pp. 214-216 (2011)

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Digital phase-shifting interferometry (PSI), a technique widely used in optical testing, requires interferograms collected at optical phase differences separated by a definite phase step. The five-frame interferogram-collecting sequence suggested by Hariharan et al. [Appl. Opt. 26, 2504 (1987)] is extremely effective in significantly reducing the errors in height profiles derived using PSI that are caused by phase-step errors. In this Letter, we report on a class of five-frame sequence that, owing to its mathematical equivalence with the one suggested by Hariharan et al. and its ease of execution, is more commonly used but is much less effective in reducing the height profile errors caused by phase-step errors.

© 2011 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.1088) Instrumentation, measurement, and metrology : Adaptive interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: July 27, 2010
Manuscript Accepted: November 6, 2010
Published: January 11, 2011

N. Ansari and W. R. Ashurst, "Experimental requirement of the error-compensating five-frame interferogram-collecting sequence used in phase-shifting interferometry," Opt. Lett. 36, 214-216 (2011)

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  1. C. T. Farrell and M. A. Player, Meas. Sci. Technol. 5, 648 (1994). [CrossRef]
  2. M. B. Sinclair, M. P. de Boer, and A. D. Corwin, Appl. Opt. 44, 7714 (2005). [CrossRef] [PubMed]
  3. K. M. Hurst, C. B. Roberts, and W. R. Ashurst, Tribol. Lett. 35, 9 (2009). [CrossRef]
  4. P. Hariharan, B. F. Oreb, and T. Eiju, Appl. Opt. 26, 2504 (1987). [CrossRef] [PubMed]

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