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Optics Letters

Optics Letters


  • Vol. 36, Iss. 7 — Apr. 1, 2011
  • pp: 1047–1049

Micromechanically tuned ring resonator in silicon on insulator

Lasse J. Kauppinen, Shahina M. C. Abdulla, Meindert Dijkstra, Meint J. de Boer, Erwin Berenschot, Gijs J. M. Krijnen, Markus Pollnau, and René M. de Ridder  »View Author Affiliations

Optics Letters, Vol. 36, Issue 7, pp. 1047-1049 (2011)

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We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm .

© 2011 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.5750) Optical devices : Resonators
(230.4685) Optical devices : Optical microelectromechanical devices
(230.7408) Optical devices : Wavelength filtering devices

ToC Category:
Optical Devices

Original Manuscript: December 14, 2010
Revised Manuscript: February 16, 2011
Manuscript Accepted: February 17, 2011
Published: March 16, 2011

Lasse J. Kauppinen, Shahina M. C. Abdulla, Meindert Dijkstra, Meint J. de Boer, Erwin Berenschot, Gijs J. M. Krijnen, Markus Pollnau, and René M. de Ridder, "Micromechanically tuned ring resonator in silicon on insulator," Opt. Lett. 36, 1047-1049 (2011)

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