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Optics Letters


  • Vol. 36, Iss. 7 — Apr. 1, 2011
  • pp: 1089–1091

Optical phase modulators using deformable waveguides actuated by micro-electro-mechanical systems

Wei-Chao Chiu, Chun-Che Chang, Jiun-Ming Wu, Ming-Chang M. Lee, and Jia-Min Shieh  »View Author Affiliations

Optics Letters, Vol. 36, Issue 7, pp. 1089-1091 (2011)

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An optical phase modulator is presented by using micro-electro-mechanical systems to actuate deformable silicon waveguides. Via mechanically stretching the waveguide length, the optical path is extended, resulting in a phase shift. The experimental results show that a phase shift of near 0.4 π is achieved at 200 V for both TE- and TM-polarized waves by cascading six phase modulation units, agreeing well with the theoretical prediction. The power consumption is estimated to be smaller than 0.2 mW at 200 V , mainly resulting from the leakage current.

© 2011 Optical Society of America

OCIS Codes
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(130.3120) Integrated optics : Integrated optics devices
(250.7360) Optoelectronics : Waveguide modulators
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Integrated Optics

Original Manuscript: January 18, 2011
Revised Manuscript: February 24, 2011
Manuscript Accepted: February 24, 2011
Published: March 18, 2011

Wei-Chao Chiu, Chun-Che Chang, Jiun-Ming Wu, Ming-Chang M. Lee, and Jia-Min Shieh, "Optical phase modulators using deformable waveguides actuated by micro-electro-mechanical systems," Opt. Lett. 36, 1089-1091 (2011)

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