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  • Vol. 36, Iss. 7 — Apr. 1, 2011
  • pp: 1119–1121

Hybrid Si - LiNbO 3 microring electro-optically tunable resonators for active photonic devices

Yoo Seung Lee, Gun-Duk Kim, Woo-Ju Kim, Sang-Shin Lee, Wan-Gyu Lee, and William H. Steier  »View Author Affiliations


Optics Letters, Vol. 36, Issue 7, pp. 1119-1121 (2011)
http://dx.doi.org/10.1364/OL.36.001119


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Abstract

Hybrid Si - LiNbO 3 electro-optic tunable ring resonators have been proposed and demonstrated as a path to achieving ultracompact and high-speed electro-optic devices. Free standing single crystal LiNbO 3 microplatelets ( mm long and 1 μm thick) were obtained from a z-cut LiNbO 3 substrate by ion implantation and thermal treatment. The platelets were transferred and thermally bonded on top of Si resonators that were fabricated in a Si-on-insulator platform by a 0.18 μm standard complementary metal-oxide-semiconductor process. For the hybrid microring resonator, a free spectral range of 16.5 nm , a finesse F of 1.67 × 10 2 , a Q-factor of 1.68 × 10 4 , and an effective r coefficient of 1.7 pm / V were achieved for the TE mode. These values are in good agreement with the calculated results.

© 2011 Optical Society of America

OCIS Codes
(190.4360) Nonlinear optics : Nonlinear optics, devices
(250.4390) Optoelectronics : Nonlinear optics, integrated optics

ToC Category:
Nonlinear Optics

History
Original Manuscript: January 25, 2011
Revised Manuscript: February 18, 2011
Manuscript Accepted: February 22, 2011
Published: March 22, 2011

Citation
Yoo Seung Lee, Gun-Duk Kim, Woo-Ju Kim, Sang-Shin Lee, Wan-Gyu Lee, and William H. Steier, "Hybrid Si-LiNbO3 microring electro-optically tunable resonators for active photonic devices," Opt. Lett. 36, 1119-1121 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-7-1119


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