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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 10 — May. 15, 2012
  • pp: 1703–1705

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

K. Hanhijärvi, I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, and E. Hæggström  »View Author Affiliations

Optics Letters, Vol. 37, Issue 10, pp. 1703-1705 (2012)

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We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

© 2012 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(320.6629) Ultrafast optics : Supercontinuum generation

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: November 7, 2011
Revised Manuscript: March 13, 2012
Manuscript Accepted: March 13, 2012
Published: May 14, 2012

K. Hanhijärvi, I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, and E. Hæggström, "Stroboscopic supercontinuum white-light interferometer for MEMS characterization," Opt. Lett. 37, 1703-1705 (2012)

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