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  • Vol. 37, Iss. 13 — Jul. 1, 2012
  • pp: 2448–2450

Linearization and minimization of cyclic error with heterodyne laser interferometry

Terry G. McRae, Magnus T. L. Hsu, Christopher H. Freund, Daniel A. Shaddock, Jan Herrmann, and Malcolm B. Gray  »View Author Affiliations


Optics Letters, Vol. 37, Issue 13, pp. 2448-2450 (2012)
http://dx.doi.org/10.1364/OL.37.002448


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Abstract

We present a method for the linearization and minimization of interferometer cyclic error. We utilize a polynomial curve fitting and resampling algorithm to correct for nonlinear mirror displacement. In the frequency domain, this algorithm compresses cyclic error into a single-frequency component and enables the precise measurement of cyclic error in a noise-dominated environment. We have applied the technique to determine the cyclic error for a range of interferometer components. In addition, we have used these measurements to optimize interferometer configuration and performance such that we routinely achieve a cyclic error of 50pm for our custom Glan–Laser interferometer and 100pm for a commercial interferometer.

© 2012 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: February 23, 2012
Revised Manuscript: April 19, 2012
Manuscript Accepted: April 20, 2012
Published: June 18, 2012

Citation
Terry G. McRae, Magnus T. L. Hsu, Christopher H. Freund, Daniel A. Shaddock, Jan Herrmann, and Malcolm B. Gray, "Linearization and minimization of cyclic error with heterodyne laser interferometry," Opt. Lett. 37, 2448-2450 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-13-2448


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