OSA's Digital Library

Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 19 — Oct. 1, 2012
  • pp: 3966–3968

Infrared imaging using arrays of SiO2 micromechanical detectors

P. G. Datskos, N. V. Lavrik, S. R. Hunter, S. Rajic, and D. Grbovic  »View Author Affiliations

Optics Letters, Vol. 37, Issue 19, pp. 3966-3968 (2012)

View Full Text Article

Enhanced HTML    Acrobat PDF (285 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



In this Letter, we describe the fabrication of an array of bimaterial detectors for infrared (IR) imaging that utilize SiO2 as a structural material. All the substrate material underneath the active area of each detector element was removed. Each detector element incorporates an optical resonant cavity layer in the IR-absorbing region of the sensing element. The simplified microfabrication process requires only four photolithographic steps with no wet etching or sacrificial layers. The thermomechanical deflection sensitivity was 7.9×103rad/K, which corresponds to a noise equivalent temperature difference (NETD) of 2.9 mK. In the present work, the array was used to capture IR images while operating at room temperature and atmospheric pressure without the need for vacuum packaging. The average measured NETD of our IR detector system was approximately 200 mK, but some sensing elements exhibited an NETD of 50 mK.

© 2012 Optical Society of America

OCIS Codes
(040.1240) Detectors : Arrays
(310.1860) Thin films : Deposition and fabrication

ToC Category:

Original Manuscript: June 21, 2012
Revised Manuscript: August 13, 2012
Manuscript Accepted: August 13, 2012
Published: September 19, 2012

P. G. Datskos, N. V. Lavrik, S. R. Hunter, S. Rajic, and D. Grbovic, "Infrared imaging using arrays of SiO2micromechanical detectors," Opt. Lett. 37, 3966-3968 (2012)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. F. Dong, Q. Zhang, D. Chen, L. Pan, Z. Guo, W. Wang, Z. Duan, and X. Wu, Sens. Actuat. A 133, 236 (2007). [CrossRef]
  2. D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, Appl. Phys. Lett. 89, 073118 (2006). [CrossRef]
  3. Z. Guo, F. D. Q. Zhang, D. Chen, Z. Xiong, Z. Miao, C. Li, B. Jiao, and X. Wu, Sens. Actuat. A 137, 13 (2007). [CrossRef]
  4. T. Ishizuya, J. Suzuki, K. Akagawa, and T. Kazama, in The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2002), p. 578.
  5. J. Salerno, Proc. SPIE 6542, 65421D (2007). [CrossRef]
  6. S. Shi, B. Jiao, D. Chen, C. Li, D. Ding, Y. Ou, T. Ye, Z. Duan, X. Wu, and Q. Zhang, Sens. Actuat. A 133, 64 (2007). [CrossRef]
  7. Y. Zhao, R. H. M. Mao, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002). [CrossRef]
  8. S. R. Hunter, G. Maurer, L. Jiang, and G. Simelgor, Proc. SPIE 6206, 62061J (2006). [CrossRef]
  9. D. Grbovic, N. V. Lavrik, S. Rajic, and P. G. Datskos, J. Appl. Phys. 104, 054508 (2008). [CrossRef]
  10. P. G. Datskos, N. V. Lavrik, and S. Rajic, Rev. Sci. Instrum. 75, 1134 (2004). [CrossRef]
  11. F. Kroeger and C. Swenson, J. Appl. Phys. 48, 853 (1977). [CrossRef]
  12. K. Goodson, M. Flik, L. Su, and D. A. Antoniadis, IEEE Electron Device Lett. 14, 490 (1993). [CrossRef]
  13. P. Lecaruyer, E. Maillart, M. Canva, and J. Rolland, Appl. Opt. 45, 8419 (2006). [CrossRef]
  14. D. Grbovic, “Imaging by detection of infrared photons using arrays of uncooled micromechanical detectors,” Ph.D. dissertation (University of Tennessee, 2008).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1. Fig. 2. Fig. 3.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited