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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 21 — Nov. 1, 2012
  • pp: 4464–4466

Grating-based at-wavelength metrology of hard x-ray reflective optics

Sebastien Berujon and Eric Ziegler  »View Author Affiliations

Optics Letters, Vol. 37, Issue 21, pp. 4464-4466 (2012)

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A mean of characterizing the tangential shape of a hard x-ray mirror is presented. Derived from a group of methods operating under visible light, its application in the x-ray domain using an x-ray absorption grating allows recovery of the mirror shape with nanometer accuracy and submillimeter spatial resolution. The method works with incoherent light, does not require any a priori information about the mirror characteristics and allows shape reconstruction of x-ray reflective optics under thermal and mechanical working conditions.

© 2012 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(340.7470) X-ray optics : X-ray mirrors

ToC Category:
X-ray Optics

Original Manuscript: July 2, 2012
Revised Manuscript: August 29, 2012
Manuscript Accepted: September 20, 2012
Published: October 23, 2012

Sebastien Berujon and Eric Ziegler, "Grating-based at-wavelength metrology of hard x-ray reflective optics," Opt. Lett. 37, 4464-4466 (2012)

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