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Toward two-dimensional nanometer resolution hard X-ray differential-interference-contrast imaging using modified photon sieves |
Optics Letters, Vol. 37, Issue 4, pp. 749-751 (2012)
http://dx.doi.org/10.1364/OL.37.000749
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Abstract
In this Letter, we report a significant step forward in the design of single-optical-element optics for two-dimensional (2D) hard X-ray differential-interference-contrast (DIC) imaging based on modified photon sieves (MPSs). MPSs were obtained by a modified optic, i.e., combining two overlaid binary gratings and a photon sieve through two logical XOR operations. The superior performance of MPSs was demonstrated. Compared to Fresnel zone plates-based DIC diffractive optical elements (DOEs), which help to improve contrast only in one direction, MPSs can provide better resolution and 2D DIC imaging. Compared to normal photon sieves, MPSs are capable of imaging at a significantly higher image contrast. We anticipate that MPSs can provide a complementary and versatile high-resolution nondestructive imaging tool for ultra-large-scale integrated circuits at 45 nm node and below.
© 2012 Optical Society of America
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(230.3990) Optical devices : Micro-optical devices
(340.7460) X-ray optics : X-ray microscopy
ToC Category:
X-ray Optics
History
Original Manuscript: December 16, 2011
Manuscript Accepted: January 4, 2012
Published: February 15, 2012
Citation
Changqing Xie, Xiaoli Zhu, Hailiang Li, Lina Shi, Yilei Hua, and Ming Liu, "Toward two-dimensional nanometer resolution hard X-ray differential-interference-contrast imaging using modified photon sieves," Opt. Lett. 37, 749-751 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-4-749
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