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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 38, Iss. 12 — Jun. 15, 2013
  • pp: 2005–2007

Out-of-plane nanomechanical tuning of double-coupled one-dimensional photonic crystal cavities

Feng Tian, Guangya Zhou, Yu Du, Fook Siong Chau, Jie Deng, and Ramam Akkipeddi  »View Author Affiliations


Optics Letters, Vol. 38, Issue 12, pp. 2005-2007 (2013)
http://dx.doi.org/10.1364/OL.38.002005


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Abstract

We demonstrate tuning of double-coupled one-dimensional photonic crystal cavities by their out-of-plane nanomechanical deformations. The coupled cavities are pulled by the vertical electrostatic force generated by the potential difference between the device layer and the handle layer in a silicon-on-insulator chip, and the induced deformations are analyzed by the finite element method. Applied with a voltage of 12 V, the cavities obtain a redshift of 0.0405 nm (twice the linewidth) for their second-order odd resonance mode and a blueshift of 0.0635 nm (three times the linewidth) for their second-order even resonance mode, which are mainly attributed to out-of-plane relative displacement. Out-of-plane tuning of coupled cavities does not need actuators and corresponding circuits; thus the device is succinct and compact. This working principle can be potentially applied in chip-level optoelectronic devices, such as sensors, switches, routers, and tunable filters.

© 2013 Optical Society of America

OCIS Codes
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Optical Devices

History
Original Manuscript: April 9, 2013
Manuscript Accepted: May 7, 2013
Published: June 3, 2013

Citation
Feng Tian, Guangya Zhou, Yu Du, Fook Siong Chau, Jie Deng, and Ramam Akkipeddi, "Out-of-plane nanomechanical tuning of double-coupled one-dimensional photonic crystal cavities," Opt. Lett. 38, 2005-2007 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-12-2005


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