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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 14 — Jul. 15, 2013
  • pp: 2434–2436

High-sensitivity dynamical profilometry with a fiber-based composite interferometer

Chun-Wei Chang, Max T. Hou, and I-Jen Hsu  »View Author Affiliations

Optics Letters, Vol. 38, Issue 14, pp. 2434-2436 (2013)

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We proposed and demonstrated a fiber-based composite interferometer, which can perform surface profile measurements with sensitivity at the nanometer scale. With the proposed phase-compensation mechanism, the phase deviation due to the instability of the optical delay component and environmental perturbations can be simultaneously compensated. The measurement sensitivity and imaging speed can be significantly improved such that the system can be used as a high-speed, high-resolution, and wide-field dynamical imaging system. The axial precision of the system was examined to be 0.82 nm. High-resolution time-lapsed dynamical imaging of onion cells during dehydration processes were performed with this system with one frame captured in 75 s.

© 2013 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 2, 2013
Manuscript Accepted: May 27, 2013
Published: July 5, 2013

Chun-Wei Chang, Max T. Hou, and I-Jen Hsu, "High-sensitivity dynamical profilometry with a fiber-based composite interferometer," Opt. Lett. 38, 2434-2436 (2013)

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