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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 14 — Jul. 15, 2013
  • pp: 2502–2504

Orthogonal polarization Mirau interferometer using reflective-type waveplate

Abraham Mario Tapilouw, Liang-Chia Chen, Yi-Jun Jen, Shyh-Tsong Lin, and Sheng-Lih Yeh  »View Author Affiliations

Optics Letters, Vol. 38, Issue 14, pp. 2502-2504 (2013)

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This work proposes an orthogonal polarization Mirau interferometry using a reflective-type waveplate to generate different polarization orientations for broadband white light interferometry. The reflective-type half-waveplate is employed as the reference arm of the Mirau interferometer to convert polarization and it generates a reference light with an orientation orthogonal to the object light. An advantage of the proposed interferometer is its ability to control the ratio of light intensity between the object and reference arms to maximize the interferometric fringe contrast. Better, more accurate calibration of standard step height has been achieved by the developed interferometer, which also can measure solder bumps that traditional Mirau interferometers usually cannot measure.

© 2013 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 3, 2013
Manuscript Accepted: May 31, 2013
Published: July 10, 2013

Abraham Mario Tapilouw, Liang-Chia Chen, Yi-Jun Jen, Shyh-Tsong Lin, and Sheng-Lih Yeh, "Orthogonal polarization Mirau interferometer using reflective-type waveplate," Opt. Lett. 38, 2502-2504 (2013)

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