OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 38, Iss. 15 — Aug. 1, 2013
  • pp: 2911–2914

Process for the fabrication of complex three-dimensional microcoils in fused silica

Feng Chen, Chao Shan, Keyin Liu, Qing Yang, Xiangwei Meng, Shengguan He, Jinhai Si, Feng Yun, and Xun Hou  »View Author Affiliations


Optics Letters, Vol. 38, Issue 15, pp. 2911-2914 (2013)
http://dx.doi.org/10.1364/OL.38.002911


View Full Text Article

Enhanced HTML    Acrobat PDF (305 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The creation of complex three-dimensional (3D) microcoils has attracted significant attention from both scientific and applied research communities. However, it still remains challenging to build 3D microcoils with arbitrary configurations using conventional planar lithographic fabrication methods. This Letter presents a new facile method based on an improved femtosecond laser wet etch technology and metal microsolidifying process for the fabrication of on-chip complex 3D microcoils inside fused silica. The diameter of the microcoils is about 30 μm, and the effective length of the microchannel is about 13 mm. The aspect ratio of the microcoils can be larger than 4001, and the microchannel exhibiting good uniformity and smoothness also has good flowability for high-viscosity conductive gallium metal. Based on this approach, we fabricated complex microcoils such as U-shaped and O-shaped microcoils that can be easily integrated into a “lab on a chip” platform or microelectric system inside fused-silica substrate.

© 2013 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: June 14, 2013
Revised Manuscript: July 4, 2013
Manuscript Accepted: July 11, 2013
Published: August 1, 2013

Citation
Feng Chen, Chao Shan, Keyin Liu, Qing Yang, Xiangwei Meng, Shengguan He, Jinhai Si, Feng Yun, and Xun Hou, "Process for the fabrication of complex three-dimensional microcoils in fused silica," Opt. Lett. 38, 2911-2914 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-15-2911


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. S. G. He and F. Chen, J. Micromech. Microeng. 22, 10 (2012).
  2. H. Takahashi, T. Dohi, K. Matsumoto, and I. Shimoyama, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).
  3. C. H. Ahn and M. G. Allen, J. Micromech. Microeng. 3, 37 (1993). [CrossRef]
  4. Y. Lu and H.-F. Ji, Sens. Actuators B 123, 2 (2007). [CrossRef]
  5. K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007). [CrossRef]
  6. K. Seemann, H. Leiste, and V. Bekker, J. Magn. Magn. Mater. 302, 321 (2006). [CrossRef]
  7. C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97–98, 280 (2002). [CrossRef]
  8. T. Dohi, K. Kuwana, K. Matsumoto, and I. Shimoyama, in Proceedings of IEEE Conference on Transducers (IEEE, 2007).
  9. M. J. K. Klein, T. Ono, M. Esashi, and J. G. Korvink, J. Micromech. Microeng. 18, 075002 (2008). [CrossRef]
  10. B. Lochel, A. Maciossek, M. Rothe, and W. Windbracke, Sens. Actuators A 54, 663 (1996). [CrossRef]
  11. D. A. Seeber, R. L. Cooper, L. Ciobanu, and C. H. Pennington, Rev. Sci. Instrum. 72, 2171 (2001). [CrossRef]
  12. K. Kratt, V. Badilita, T. Burger, J. G. Korvink, and U. Wallrabe, J. Micromech. Microeng. 20, 015021 (2010). [CrossRef]
  13. S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, and Y. Haga, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).
  14. L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006). [CrossRef]
  15. R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 3 (2011). [CrossRef]
  16. B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).
  17. A. Marcinkeviˇcius and S. Juodkazis, Opt. Lett. 26, 277 (2001). [CrossRef]
  18. S. He and F. Chen, Opt. Lett. 37, 18 (2012).
  19. S. Juodkazis and K. Yamasaki, Appl. Phys. A 79, 4 (2004).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited