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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 38, Iss. 19 — Oct. 1, 2013
  • pp: 3862–3865

Ultraweak background scattered light reveals structure of a diffractive element

Manabu Hakko, Tomohiro Kiire, Daisuke Barada, Toyohiko Yatagai, and Yoshio Hayasaki  »View Author Affiliations


Optics Letters, Vol. 38, Issue 19, pp. 3862-3865 (2013)
http://dx.doi.org/10.1364/OL.38.003862


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Abstract

Background scattered light should normally be reduced in industrial fabrication processes; however, we demonstrated that background scattered light from an optical element contains significant structural information about the element. This was revealed by quite good agreement between the measured scattering intensity distribution of a sample and a computer simulation of the light intensity from the sample. The intensity distribution from a carefully fabricated sample with artificially controlled defects was obtained with a measurement system designed to measure ultraweak background scattered light covering an intensity range of over 1010.

© 2013 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(290.0290) Scattering : Scattering
(290.5820) Scattering : Scattering measurements

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: July 18, 2013
Revised Manuscript: August 25, 2013
Manuscript Accepted: August 30, 2013
Published: September 24, 2013

Citation
Manabu Hakko, Tomohiro Kiire, Daisuke Barada, Toyohiko Yatagai, and Yoshio Hayasaki, "Ultraweak background scattered light reveals structure of a diffractive element," Opt. Lett. 38, 3862-3865 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-19-3862


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References

  1. P. Zhou and J. H. Burge, Appl. Opt. 46, 657 (2007). [CrossRef]
  2. A. J. Caley, M. Braun, A. J. Waddie, and M. R. Taghizadeh, Proc. SPIE 6185, 6185E (2006). [CrossRef]
  3. V. P. Kiryanov, V. G. Nikitin, and A. G. Verkhogliad, Proc. SPIE 4900, 977 (2002). [CrossRef]
  4. S. H. Lee, H.-S. Jeong, and Y. S. Jin, J. Opt. Soc. Korea 10, 105 (2006). [CrossRef]
  5. H. Gross, M.-A. Henn, S. Heidenreich, A. Rathsfeld, and M. Bar, Appl. Opt. 51, 7384 (2012). [CrossRef]
  6. T. Meguriya, T. Kiire, D. Barada, Y. Hayasaki, and T. Yatagai, ISOT2011 International Symposium on Optomechatronic Technologies, Hong Kong (2011).
  7. K. S. Yee, IEEE Trans. Antennas Propagat. AP-14, 302 (1966). [CrossRef]

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