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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 8 — Apr. 15, 2013
  • pp: 1304–1306

Silicon carbide microdisk resonator

Xiyuan Lu, Jonathan Y. Lee, Philip X.-L. Feng, and Qiang Lin  »View Author Affiliations

Optics Letters, Vol. 38, Issue 8, pp. 1304-1306 (2013)

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We demonstrate a silicon carbide (SiC) microdisk resonator with an intrinsic optical quality factor of 6.19 × 10 3 , fabricated on the 3C-SiC-on-Si platform. We characterize the temperature dependence of the cavity resonance and obtain a thermo-optic coefficient of 2.92 × 10 5 / K for 3C-SiC. Our simulations show that the device exhibits great potential for cavity optomechanical applications.

© 2013 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(160.3130) Materials : Integrated optics materials
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

Original Manuscript: February 20, 2013
Revised Manuscript: March 11, 2013
Manuscript Accepted: March 12, 2013
Published: April 10, 2013

Xiyuan Lu, Jonathan Y. Lee, Philip X.-L. Feng, and Qiang Lin, "Silicon carbide microdisk resonator," Opt. Lett. 38, 1304-1306 (2013)

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