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Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 1 — Jan. 1, 2014
  • pp: 170–173

High-efficiency, broad-bandwidth metal/multilayer-dielectric gratings

Heyuan Guan, Hui Chen, Jianbo Wu, Yunxia Jin, Fanyu Kong, Shijie Liu, Kui Yi, and Jianda Shao  »View Author Affiliations

Optics Letters, Vol. 39, Issue 1, pp. 170-173 (2014)

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We report on an 800 nm center-wavelength metal/multilayer-dielectric grating (MMDG) with broadband, high diffraction efficiency. The trapezoidal grating ridge consists of an HfO 2 layer sandwiched between two SiO 2 films. Combining the advantages of SiO 2 and HfO 2 , the grating ridge reduces the difficulties of grating ridge attainment. For such a configuration, high-performance MMDG can be successfully fabricated using the existing technology. Experimentally we demonstrated a 163 nm bandwidth MMDG with 1 st-order diffraction efficiency greater than 90%. The fabricated MMDG achieved high performance as the design with large fabrication tolerances.

© 2013 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(310.0310) Thin films : Thin films
(320.5520) Ultrafast optics : Pulse compression

ToC Category:
Diffraction and Gratings

Original Manuscript: September 30, 2013
Revised Manuscript: November 22, 2013
Manuscript Accepted: November 29, 2013
Published: December 24, 2013

Heyuan Guan, Hui Chen, Jianbo Wu, Yunxia Jin, Fanyu Kong, Shijie Liu, Kui Yi, and Jianda Shao, "High-efficiency, broad-bandwidth metal/multilayer-dielectric gratings," Opt. Lett. 39, 170-173 (2014)

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