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Optics Letters

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  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 10 — May. 15, 2014
  • pp: 2827–2830

Sub-micron silica diaphragm-based fiber-tip Fabry–Perot interferometer for pressure measurement

Changrui Liao, Shen Liu, Lei Xu, Chao Wang, Yiping Wang, Zhengyong Li, Qiao Wang, and D. N. Wang  »View Author Affiliations


Optics Letters, Vol. 39, Issue 10, pp. 2827-2830 (2014)
http://dx.doi.org/10.1364/OL.39.002827


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Abstract

We demonstrate a sub-micron silica diaphragm-based fiber-tip Fabry–Perot interferometer for pressure sensing applications. The thinnest silica diaphragm, with a thickness of 320nm, has been achieved by use of an improved electrical arc discharge technique. Such a sub-micron silica diaphragm breaks the sensitivity limitation imposed by traditional all-silica Fabry–Perot interferometric pressure sensors and, as a result, a high pressure sensitivity of 1036pm/MPa at 1550 nm and a low temperature cross-sensitivity of 960Pa/°C are achieved when a silica diaphragm of 500nm in thickness is used. Moreover, the all-silica spherical structure enhanced the mechanical strength of the micro-cavity sensor, making it suitable for high sensitivity pressure sensing in harsh environments.

© 2014 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(310.6845) Thin films : Thin film devices and applications

ToC Category:
Thin Films

History
Original Manuscript: January 23, 2014
Revised Manuscript: April 2, 2014
Manuscript Accepted: April 7, 2014
Published: May 2, 2014

Citation
Changrui Liao, Shen Liu, Lei Xu, Chao Wang, Yiping Wang, Zhengyong Li, Qiao Wang, and D. N. Wang, "Sub-micron silica diaphragm-based fiber-tip Fabry–Perot interferometer for pressure measurement," Opt. Lett. 39, 2827-2830 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-10-2827


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