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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 17 — Sep. 1, 2014
  • pp: 5220–5223

Real-time phase shift interference microscopy

Avner Safrani and Ibrahim Abdulhalim  »View Author Affiliations


Optics Letters, Vol. 39, Issue 17, pp. 5220-5223 (2014)
http://dx.doi.org/10.1364/OL.39.005220


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Abstract

A real-time phase shift interference microscopy system is presented using a polarization-based Linnik interferometer operating with three synchronized, phase-masked, parallel detectors. Using this method, several important applications that require high speed and accuracy, such as dynamic focusing control, tilt measurement, submicrometer roughness measurement, and 3D profiling of fine structures, are demonstrated in 50 volumes per second and with 2 nm height repeatability.

© 2014 Optical Society of America

OCIS Codes
(030.5770) Coherence and statistical optics : Roughness
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 18, 2014
Manuscript Accepted: July 28, 2014
Published: August 29, 2014

Citation
Avner Safrani and Ibrahim Abdulhalim, "Real-time phase shift interference microscopy," Opt. Lett. 39, 5220-5223 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-17-5220


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