OSA's Digital Library

Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 17 — Sep. 1, 2014
  • pp: 5240–5243

Polarization-independent etching of fused silica based on electrons dynamics control by shaped femtosecond pulse trains for microchannel fabrication

X. Yan, L. Jiang, X. Li, K. Zhang, B. Xia, P. Liu, L. Qu, and Y. Lu  »View Author Affiliations

Optics Letters, Vol. 39, Issue 17, pp. 5240-5243 (2014)

View Full Text Article

Enhanced HTML    Acrobat PDF (399 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We propose an approach to realize polarization-independent etching of fused silica by using temporally shaped femtosecond pulse trains to control the localized transient electrons dynamics. Instead of nanograting formation using traditional unshaped pulses, for the pulse delay of pulse trains larger than 1 ps, coherent field-vector-related coupling is not possible and field orientation is lost. The exponential growth of the periodic structures is interrupted. In this case, disordered and interconnected nanostructures are formed, which is probably the main reason of etching independence on the laser polarization. As an application example, square-wave-shaped and arc-shaped microchannels are fabricated by using pulse trains to demonstrate the advantage of the proposed method in fabricating high-aspect-ratio and three-dimensional microchannels.

© 2014 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Optical Devices

Original Manuscript: July 4, 2014
Revised Manuscript: August 2, 2014
Manuscript Accepted: August 5, 2014
Published: August 29, 2014

X. Yan, L. Jiang, X. Li, K. Zhang, B. Xia, P. Liu, L. Qu, and Y. Lu, "Polarization-independent etching of fused silica based on electrons dynamics control by shaped femtosecond pulse trains for microchannel fabrication," Opt. Lett. 39, 5240-5243 (2014)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. G. M. Whitesides, Nature 442, 368 (2006). [CrossRef]
  2. R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 442 (2011). [CrossRef]
  3. K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009). [CrossRef]
  4. A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, Opt. Lett. 26, 277 (2001). [CrossRef]
  5. S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009). [CrossRef]
  6. K. Miura, J. R. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Appl. Phys. Lett. 71, 3329 (1997). [CrossRef]
  7. R. Taylor, C. Hnatovsky, and E. Simova, Laser Photon. Rev. 2, 26 (2008). [CrossRef]
  8. W. Watanabe, T. Toma, K. Yamada, J. Nishii, K.-i. Hayashi, and K. Itoh, Opt. Lett. 25, 1669 (2000). [CrossRef]
  9. R. S. Taylor, C. Hnatovsky, E. Simova, D. M. Rayner, M. Mehandale, V. R. Bhardwaj, and P. B. Corkum, Opt. Express 11, 775 (2003). [CrossRef]
  10. C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, Opt. Lett. 30, 1867 (2005). [CrossRef]
  11. C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006). [CrossRef]
  12. S. G. He, F. Chen, K. Y. Liu, Q. Yang, H. W. Liu, H. Bian, X. W. Meng, C. Shan, J. H. Si, Y. L. Zhao, and X. Hou, Opt. Lett. 37, 3825 (2012). [CrossRef]
  13. K. Y. Liu, Q. Yang, Y. L. Zhao, F. Chen, C. Shan, S. G. He, X. L. Fan, L. Li, X. W. Meng, G. Q. Du, and H. Bian, Microelectron. Eng. 113, 93 (2014). [CrossRef]
  14. Y. P. Deng, X. H. Xie, H. Xiong, Y. X. Leng, C. F. Cheng, H. H. Lu, R. X. Li, and Z. Z. Xu, Opt. Express 13, 3096 (2005). [CrossRef]
  15. Y. Shimotsuma, P. G. Kazansky, J. R. Qiu, and K. Hirao, Phys. Rev. Lett. 91, 247405 (2003). [CrossRef]
  16. V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, Phys. Rev. Lett. 96, 057404 (2006). [CrossRef]
  17. X. S. Shi, L. Jiang, X. Li, S. M. Wang, Y. P. Yuan, and Y. F. Lu, Opt. Lett. 38, 3743 (2013). [CrossRef]
  18. M. Forster, W. Kautek, N. Faure, E. Audouard, and R. Stoian, Phys. Chem. Chem. Phys. 13, 4155 (2011). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1. Fig. 2. Fig. 3.
Fig. 4.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited