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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 4 — Feb. 15, 2014
  • pp: 1042–1045

Pulse compression grating fabrication by diffractive proximity photolithography

Lorenz Stuerzebecher, Frank Fuchs, Torsten Harzendorf, and Uwe D. Zeitner  »View Author Affiliations


Optics Letters, Vol. 39, Issue 4, pp. 1042-1045 (2014)
http://dx.doi.org/10.1364/OL.39.001042


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Abstract

We report about a newly devised throughput-scalable fabrication method for high-quality periodic submicron structures. The process is demonstrated for optical transmission gratings in fused silica with a period of 800 nm (1250lines/mm) to be used in laser pulse compression. The technology is based on an innovative advancement of i-line proximity photolithography performed in a mask aligner. The aerial image is encoded in a rigorously optimized electron-beam-written three-level phase mask which is illuminated by an adapted multipole configuration of incidence angles. In comparison to conventional proximity lithography, the process enables a significantly higher resolution while maintaining a good depth of focus—in contrast to lithography based on direct Talbot-imaging. Details about the grating fabrication process and characterization of fabricated pulse compression grating wafers are presented. The gratings show a diffraction efficiency of 97% at a wavelength of 1030 nm and a wavefront error comparable to gratings fabricated by electron-beam lithography.

© 2014 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(220.3740) Optical design and fabrication : Lithography
(230.4000) Optical devices : Microstructure fabrication
(320.5520) Ultrafast optics : Pulse compression
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: December 17, 2013
Revised Manuscript: January 10, 2014
Manuscript Accepted: January 12, 2014
Published: February 12, 2014

Citation
Lorenz Stuerzebecher, Frank Fuchs, Torsten Harzendorf, and Uwe D. Zeitner, "Pulse compression grating fabrication by diffractive proximity photolithography," Opt. Lett. 39, 1042-1045 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-4-1042


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References

  1. E. B. Treacy, IEEE J. Quantum Electron. 5, 454 (1969). [CrossRef]
  2. D. Strickland and G. Mourou, Opt. Commun. 55, 447 (1985). [CrossRef]
  3. P. Maine, D. Strickland, P. Bado, M. Pessot, and G. Mourou, IEEE J. Quantum Electron. 24, 398 (1988). [CrossRef]
  4. U. D. Zeitner, M. Oliva, F. Fuchs, D. Michaelis, T. Benkenstein, T. Harzendorf, and E. B. Kley, Appl. Phys. A 109, 789 (2012). [CrossRef]
  5. M. Oliva, T. Harzendorf, D. Michaelis, U. D. Zeitner, and A. Tünnermann, Opt. Express 19, 14735 (2011). [CrossRef]
  6. M. L. Shattenburg, C. R. Canizares, D. Dewey, K. A. Flanagan, M. Hamnett, A. M. Levin, K. S. K. Rum, R. Manikkalingam, T. H. Markert, and H. I. Smith, Opt. Eng. 30, 1590 (1991). [CrossRef]
  7. W. Mao, I. Wathuthanthri, and C.-H. Choi, Opt. Lett. 36, 3176 (2011). [CrossRef]
  8. C. Mack, Fundamental Principles of Optical Lithography (Wiley, 2007).
  9. L. Stuerzebecher, T. Harzendorf, U. Vogler, U. D. Zeitner, and R. Voelkel, Opt. Express 18, 19485 (2010). [CrossRef]
  10. R. Voelkel, U. Vogler, A. Bich, P. Pernet, K. J. Weible, M. Hornung, R. Zoberbier, E. Cullmann, L. Stuerzebecher, T. Harzendorf, and U. D. Zeitner, Opt. Express 18, 20968 (2010). [CrossRef]
  11. L. Stuerzebecher, T. Harzendorf, F. Fuchs, and U. D. Zeitner, Proc. SPIE 8249, 82490R (2012). [CrossRef]
  12. H. F. Talbot, Philos. Mag. 9(56), 401 (1836).
  13. L. Rayleigh, Philos. Mag. 11(67), 196 (1881). [CrossRef]

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