Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Correction of large birefringent effect of windows for in situ ellipsometry measurements

Not Accessible

Your library or personal account may give you access

Abstract

To extract true optical properties of samples in a chamber with entrance and exit optical windows, oftentimes the windows were approximated as simple retarders where the retardation was small and premeasured under a given condition. The proposed method allows to cope with large birefringent effect of chamber windows thanks to its capability of extracting ellipsometric parameters (Δ, Ψ) of isotropic samples as well as measuring birefringent parameters (δ, θ) of each window separately and simultaneously. This method is, however, not valid for anisotropic samples. Ex situ results and extracted ellipsometric parameters results from in situ measurements of a silicon substrate and a SiO2 film thermally grown on the silicon substrate exhibited excellent agreement and provided significance of this method.

© 2014 Optical Society of America

Full Article  |  PDF Article
More Like This
General window correction method for ellipsometry measurements

Lianhua Jin, Syouki Kasuga, and Eiichi Kondoh
Opt. Express 22(23) 27811-27820 (2014)

Correction of large retardation window effect for ellipsometry measurements using quasi-Newton method

Lianhua Jin, Syouki Kasuga, Eiichi Kondoh, and Bernard Gelloz
Appl. Opt. 54(10) 2991-2998 (2015)

Windows in ellipsometry measurements

Gerald E. Jellison
Appl. Opt. 38(22) 4784-4789 (1999)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (20)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved