Interferometer for measuring displacement and distance
Optics Letters, Vol. 12, Issue 5, pp. 310-312 (1987)
http://dx.doi.org/10.1364/OL.12.000310
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Abstract
A simple interferometer for measuring both relative displacement and absolute distance is fabricated that uses a laser diode. The sign of the displacement is detected by means of a λ/8 plate, and the distance is measured by a FM radar technique of modulating the laser-diode frequency. Measurement accuracies of 0.02 µm for displacement and 100 µm for distance are obtained over a range of a few meters.
© 1987 Optical Society of America
Citation
Toshihiro Kubota, Makoto Nara, and Toshihiko Yoshino, "Interferometer for measuring displacement and distance," Opt. Lett. 12, 310-312 (1987)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-12-5-310
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