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Optics Letters

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  • Vol. 12, Iss. 7 — Jul. 1, 1987
  • pp: 456–458

Nondestructive depth profiling of ZnS and MgO films by spectroscopic ellipsometry

K. Vedam, S. Y. Kim, L. D'Aries, and A. H. Guenther  »View Author Affiliations


Optics Letters, Vol. 12, Issue 7, pp. 456-458 (1987)
http://dx.doi.org/10.1364/OL.12.000456


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Abstract

Spectroscopic ellipsometric (SE) measurements followed by linear-regression analysis of the SE data obtained on ZnS and MgO films on vitreous silica substrates reveal the distribution of voids (or low-density regions) in these transparent thin films.

© 1987 Optical Society of America

History
Original Manuscript: January 29, 1987
Manuscript Accepted: March 25, 1987
Published: July 1, 1987

Citation
K. Vedam, A. H. Guenther, S. Y. Kim, and L. D'Aries, "Nondestructive depth profiling of ZnS and MgO films by spectroscopic ellipsometry," Opt. Lett. 12, 456-458 (1987)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-12-7-456


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References

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