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Optics Letters

Optics Letters


  • Vol. 12, Iss. 7 — Jul. 1, 1987
  • pp: 456–458

Nondestructive depth profiling of ZnS and MgO films by spectroscopic ellipsometry

K. Vedam, S. Y. Kim, L. D'Aries, and A. H. Guenther  »View Author Affiliations

Optics Letters, Vol. 12, Issue 7, pp. 456-458 (1987)

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Spectroscopic ellipsometric (SE) measurements followed by linear-regression analysis of the SE data obtained on ZnS and MgO films on vitreous silica substrates reveal the distribution of voids (or low-density regions) in these transparent thin films.

© 1987 Optical Society of America

Original Manuscript: January 29, 1987
Manuscript Accepted: March 25, 1987
Published: July 1, 1987

K. Vedam, A. H. Guenther, S. Y. Kim, and L. D'Aries, "Nondestructive depth profiling of ZnS and MgO films by spectroscopic ellipsometry," Opt. Lett. 12, 456-458 (1987)

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