Spectroscopic ellipsometric (SE) measurements followed by linear-regression analysis of the SE data obtained on ZnS and MgO films on vitreous silica substrates reveal the distribution of voids (or low-density regions) in these transparent thin films.
© 1987 Optical Society of America
Original Manuscript: January 29, 1987
Manuscript Accepted: March 25, 1987
Published: July 1, 1987
K. Vedam, A. H. Guenther, S. Y. Kim, and L. D'Aries, "Nondestructive depth profiling of ZnS and MgO films by spectroscopic ellipsometry," Opt. Lett. 12, 456-458 (1987)