Abstract

We have constructed a scanning soft-x-ray microscope that uses a laser-produced plasma as the soft-x-ray source and normal-incidence multilayer-coated mirrors in a Schwarzschild configuration as the focusing optics. The microscope operates at a wavelength of 14 nm, has a spatial resolution of 0.5 μm, and has a soft-x-ray photon flux through the focus of 10⁴–10⁵ sec⁻¹ when operated with only 170 mW of average laser power. The microscope is compact; the complete system, including the laser, fits on a single optical table.

© 1989 Optical Society of America

First stage in the development of a soft-x-ray reflection imaging microscope in the Schwarzschild configuration using a soft-x-ray laser at 18.2 nm

D. S. DiCicco, D. Kim, R. Rosser, and S. Suckewer
Opt. Lett. 17(2) 157-159 (1992)

Uniformity of the soft-x-ray emissions from gold foils irradiated by OMEGA laser beams determined by a two-mirror normal-incidence microscope with multilayer coatings

John F. Seely, Glenn E. Holland, Thomas Boehly, Gregory Pien, and David Bradley
Appl. Opt. 37(7) 1140-1145 (1998)

Compact soft x-ray microscope using a gas-discharge light source

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Opt. Lett. 33(20) 2359-2361 (2008)

Diffraction-limited soft-x-ray projection imaging using a laser plasma source

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Soft-x-ray imaging from an ultrashort-pulse laser-produced plasma using a multilayer coated optic

J. R. Norby and L. D. Van Woerkom
J. Opt. Soc. Am. B 13(2) 454-458 (1996)