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Fundamental limit on accuracy in interferometry

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Abstract

We derive a golden rule to evaluate the limit on fringe resolution. The rule, which is derived from basic principles, takes into consideration the existence of mechanical vibration. We show that conventional interferometer systems are limited by the available vibration-isolation tables to approximately 1/1000 of a fringe. In principle, moiré deflectometry can yield a much better signal-to-noise ratio.

© 1989 Optical Society of America

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