We have constructed a correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter, and we have developed a method to extract the amplitude and phase information of the reflected signal from a sample located at the microscope object plane. An imaging theory for the interference microscope has been derived, which predicts accurately both the transverse response at a sharp edge and the range response to a perfect plane reflector.
© 1990 Optical Society of America
Original Manuscript: November 27, 1989
Manuscript Accepted: March 5, 1990
Published: May 15, 1990
Stanley S. C. Chim and G. S. Kino, "Correlation microscope," Opt. Lett. 15, 579-581 (1990)