An analytical discussion of the thin-film design optimization for high-efficiency multilevel phase gratings is presented. The results permit the determination of the thin-film optimum thickness and refraction index in order to obtain high efficiency in phase-only diffractive optical elements.
© 1991 Optical Society of America
Stefano Beretta and Massimo Cairoli, "Design of multilevel thin-film phase gratings with optimized diffraction efficiency," Opt. Lett. 16, 684-686 (1991)