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Optics Letters

Optics Letters


  • Vol. 17, Iss. 9 — May. 1, 1992
  • pp: 688–690

Deformable grating optical modulator

O. Solgaard, F. S. A. Sandejas, and D. M. Bloom  »View Author Affiliations

Optics Letters, Vol. 17, Issue 9, pp. 688-690 (1992)

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A new type of light modulator, the deformable grating modulator, based on electrically controlling the amplitude of a micromachined phase grating is described. Mechanical motion of one quarter of a wavelength is sufficient for switching in this device. The small mechanical motion allows the use of structures with high mechanical resonance frequencies. We have developed a deformable grating modulator with a bandwidth of 1.8 MHz and a switching voltage of 3.2 V and have demonstrated modulation with 16 dB of contrast. Smaller devices with bandwidths of as much as 6.1 MHz and predicted switching voltages of less than 10 V were also fabricated.

© 1992 Optical Society of America

Original Manuscript: January 9, 1992
Published: May 1, 1992

O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, "Deformable grating optical modulator," Opt. Lett. 17, 688-690 (1992)

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