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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 18, Iss. 17 — Sep. 1, 1993
  • pp: 1462–1464

Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms

Peter de Groot and Leslie Deck  »View Author Affiliations


Optics Letters, Vol. 18, Issue 17, pp. 1462-1464 (1993)
http://dx.doi.org/10.1364/OL.18.001462


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Abstract

We demonstrate a simple way of increasing the data acquisition and processing speed in a scanning white-light interferometer for surface topography measurement. The method consists of undersampling interference data and processing the resultant sub-Nyquist interferograms in the frequency domain to create complete three-dimensional images. Experimental results on a 20-μm step height standard show a measurement repeatability of 10 nm.

© 1993 Optical Society of America

History
Original Manuscript: March 22, 1993
Published: September 1, 1993

Citation
Peter de Groot and Leslie Deck, "Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms," Opt. Lett. 18, 1462-1464 (1993)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-18-17-1462


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References

  1. N. Balasubramanian, “Optical system for surface topography measurement,” U.S. Patent4,340,306 (July20, 1982).
  2. M. Davidson, K. Kaufman, I. Mazor, Solid State Technol. 30, 57 (1987).
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  6. P. J. Caber, “Interferometric profiles for rough surfaces,” Appl. Opt. 32, 3438 (1993). [CrossRef] [PubMed]
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