We demonstrate a simple way of increasing the data acquisition and processing speed in a scanning white-light interferometer for surface topography measurement. The method consists of undersampling interference data and processing the resultant sub-Nyquist interferograms in the frequency domain to create complete three-dimensional images. Experimental results on a 20-μm step height standard show a measurement repeatability of 10 nm.
© 1993 Optical Society of America
Original Manuscript: March 22, 1993
Published: September 1, 1993
Peter de Groot and Leslie Deck, "Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms," Opt. Lett. 18, 1462-1464 (1993)