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Optics Letters

Optics Letters


  • Vol. 18, Iss. 22 — Nov. 15, 1993
  • pp: 1899–1901

Two-color light-emitting-diode source for high-precision phase-shifting interferometry

L. Deck and F. Demarest  »View Author Affiliations

Optics Letters, Vol. 18, Issue 22, pp. 1899-1901 (1993)

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We describe a two-color light-emitting-diode source that provides intense, uniform, and highly stable illumination with a wavelength precision sufficient for multiwavelength phase-shifting interferometry applications. The source has feedback-stabilized intensity and junction temperature sensing for wavelength compensation. It has a theoretical mean time between failure of more than 30,000 h, and the two colors provide a step measurement capability of greater than 2.5 μm. Measurements made with this source in an interferometric microscope show subangstrom repeatability.

© 1993 Optical Society of America

Original Manuscript: July 22, 1993
Published: November 15, 1993

L. Deck and F. Demarest, "Two-color light-emitting-diode source for high-precision phase-shifting interferometry," Opt. Lett. 18, 1899-1901 (1993)

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  1. T. Fujihara, Y. Shimada, C. Nagano, K. Tsukamoto, “Illuminating device for microscopes,”U.S. patent4,852,985 (August1, 1989).
  2. J. C. Wyant, C. L. Koliopoulis, B. Bushan, D. Basila, J. Tribol. 108, 1 (1986). [CrossRef]
  3. J. F. Biegen, R. A. Smythe, Surf. Topography 1, 469 (1988).
  4. T. A. Nussmeier, “Interferometric distance measurement method,”U.S. patent4,355, 899 (October26, 1982).
  5. Y. Y. Cheng, J. C. Wyant, Appl. Opt. 23, 4539 (1984). [CrossRef] [PubMed]
  6. K. Creath, Appl. Opt. 26, 2810 (1987). [CrossRef] [PubMed]
  7. P. J. de Groot, S. Kishner, Appl. Opt. 30, 4026 (1991). [CrossRef] [PubMed]
  8. C. P. Brophy, J. Opt. Soc. Am. A 7, 537 (1990). [CrossRef]
  9. J. van Wingerden, H. J. Frankena, C. Smorenburg, Appl. Opt. 30, 2718 (1991). [CrossRef] [PubMed]

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