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Electrically addressed 256 by 256 liquid-crystal-on-silicon spatial light modulator

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Abstract

A 256 by 256 pixel spatial light modulator has been designed and constructed with liquid-crystal-on-silicon technology. The device is a binary electrically addressed spatial light modulator with a measured zero-order contrast ratio of 70:1 and an imaged contrast ratio of 10:1. The electronic load time is 43 μs, and the 10-to-90% switching time of the liquid crystal is 50 μs (turn-on) and 50 μs (turn-off), giving a maximum frame rate of ∼10 kHz. Its design for a specific application is described, and the first operational results are presented.

© 1993 Optical Society of America

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