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Optics Letters

Optics Letters


  • Vol. 18, Iss. 3 — Feb. 1, 1993
  • pp: 238–240

Imaging and vibrational analysis with laser-feedback interferometry

Alan Bearden, Michael P. O’Neill, Leslie C. Osborne, and Terrence L. Wong  »View Author Affiliations

Optics Letters, Vol. 18, Issue 3, pp. 238-240 (1993)

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We have constructed a scanning confocal laser-feedback microscope that determines surface profiles in the range of 5 nm to 3 μm with ~200-nm lateral discrimination. A direct comparison is made with scanning electron microscopy, and an image of a silicon resolution standard with 40-nm-high structures is shown. The device is also capable of characterizing surface motion with a sensitivity of <1 pm (Hz)−1/2 across a bandwidth of several megahertz. Vibrational analysis of a miniature piezoelectric microphone is demonstrated from 50 Hz to 50 kHz. An operational description of the device is presented in addition to a generalization of laser-feedback theory that includes gas-laser dynamics.

© 1993 Optical Society of America

Original Manuscript: September 10, 1992
Published: February 1, 1993

Alan Bearden, Michael P. O’Neill, Leslie C. Osborne, and Terrence L. Wong, "Imaging and vibrational analysis with laser-feedback interferometry," Opt. Lett. 18, 238-240 (1993)

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