Chirped Mo–Si multilayer coatings, where the multilayer period is systematically varied throughout the deposition process, exhibit an increased x-ray bandwidth at normal incidence with a corresponding increase in the integrated reflectance of as much as 20% at λ ~ 13 nm. The increased bandwidth is accompanied by a slight reduction in peak reflectance. The relation between the integrated and peak reflectance is used to determine the chirp required to optimize the x-ray throughput of a multiple-element optical system.
© 1993 Optical Society of America
Original Manuscript: November 23, 1992
Published: May 1, 1993
S. P. Vernon, D. G. Stearns, and R. S. Rosen, "Chirped multilayer coatings for increased x-ray throughput," Opt. Lett. 18, 672-674 (1993)