Mo/Y multilayer mirrors were deposited by dc magnetron sputtering under different deposition conditions. They were characterized by reflectance measurements at normal and grazing angles of incidence, by transmission electron microscopy, and by Auger depth profiling. Normal-incidence peak reflectances of 34% and 22% were measured at wavelengths of 11.5 and 8.1 nm, respectively. Interface roughness and contamination of the layers during deposition limit the peak reflectance of these Mo/Y mirrors.
© 1994 Optical Society of America
Original Manuscript: March 3, 1994
Published: July 1, 1994
Claude Montcalm, J. M. Slaughter, M. Chaker, Patrick A. Kearney, Brian T. Sullivan, M. Ranger, and Charles M. Falco, "Mo/Y multilayer mirrors for the 8–12-nm wavelength region," Opt. Lett. 19, 1004-1006 (1994)